
Silicon Microstructures, Inc.
DESCRIPTION
The SM1X21 Series is a digital, medium pressure MEMS sensor family offering state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce a digital, fully conditioned, multi-order pressure and temperature compensated sensor in JEDEC standard SOIC-16 package with both dual vertical and dual horizontal porting options. It is available in both compound gage or differential pressure configurations. With the dual porting, a vacuum-gage measurement is possible to minimize altitude errors due to changes in ambient pressure.
FEATURES
• 15 PSI gauge, differential and asymmetric outputs
• 14-bit digital, pressure calibrated and temperature compensated
output
• I2C Digital Interface
• Compensated temperature range: -20 to 85oC
• Insensitive to mounting orientation
• Robust JEDEC SOIC-16 package for automated assembly
• Manufactured according to ISO9001 and ISO/TS 16949 standards