
Intersema Sensoric SA
DESCRIPTION
The sensor element of the MS7801 consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor (MS7801A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (MS7801D) has a hole in the Pyrex glass at the backside of the sensor.
• 0 to 100 kPa range (1 bar or 14.5PSI)
• Absolute/differential pressure sensors
• RoHS-compatible & Pb-free1
FEATURES
• Uncompensated pressure sensor die
• Linearity 0.05% (typical)
• Output Span 150mV @ 5V
• Small Die Size 1.98 x 1.84mm
• Temperature Range -40°…+125°C
• Low Cost, High reliability
APPLICATION
• For absolute or differential pressure sensor systems
• Barometers, Altimeters
• Variometers