
Intersema Sensoric SA
DESCRIPTION
The MS7212 is an absolute silicon micro-machined pressure sensor for harsh environment. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a Pyrex™ cap. The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane. To improve the sensor stability, a drilled Pyrex™ is bonded on the backside. As the pressure port consists of Pyrex™ and silicon, both stable in most of the chemicals, the MS7212 is suitable for media-resistive applications.
• 0 to 1200 kPa range (12 bar or 174 PSI)
• Absolute pressure sensors
• Hermetic sensor
• RoHS-compatible & Pb-free1
FEATURES
• Media resistive pressure sensor die
• Linearity 0.05% (typical)
• Output Span 150mV @ 5 V
• Die Size 1.63 x 1.95 mm2
• Temperature Range -40°…+125°C
• Low Cost, High reliability
APPLICATION
• Harsh environments
• Tire pressure
• Absolute pressure sensor systems
• Engine controls
• Braking systems
• Diving computers