
Intersema Sensoric SA
DESCRIPTION
The MS7207-A2 is an absolute silicon micro-machined pressure sensor for harsh environment, with the pads on one side. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a glass cap. The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane. To improve the sensor stability, a drilled glass is bonded on the backside. As the pressure port consists of glass and silicon, both stable in most of the chemicals, the MS7207-A2 is suitable for media-resistive applications.
• 0 to 700 kPa range (7 bar or 102 PSI)
• Uncompensated absolute pressure sensor die
• Piezoresistive silicon micromachined sensor
• Hermetic sensor, temperature up to 150°C
• Pads on one side
• RoHS-compatible & Pb-free1
FEATURES
• Media resistive pressure sensor die
• Linearity 0.15% (typical)
• Typical output Span 150mV @ 5 V
• Die size 1.73 x 1.18 mm2
• Temperature range -40°…+150°C
• Low cost, high reliability & stability
APPLICATION
• Harsh environments
• Absolute pressure sensor systems