Silicon Piezoresistive
Absolute Pressure Sensor
KPY 52-AK
KPY 56-AK
Features
• Low pressure and temperature hysteresis
• Fast response
• High sensitivity and linearity
• Fatigue free monocrystaline silicon diaphragm
giving high load cycle stability
• High long term stability
• Built in silicon temperature sensor
• Provided for further fabrication, protection cap
TO-8-5
Type
Symbol Pressure Range Unit
Ordering Code
KPY 52-AK
KPY 53-AK
KPY 54-AK
KPY 55-AK
KPY 56-AK
P0 … PN
0 … 0.6
0 … 1.6
0…4
0 … 10
0 … 25
bar
Q62705-K205
Q62705-K192
Q62705-K194
Q62705-K196
Q62705-K198
Pin Configuration
1
Capillary tube
2
+ VIN
3
− VOUT
4
Temperature sensor
(typ. R25 = 2 kΩ)
5
Temperature sensor
6
− VIN
7
+ VOUT
8
Not connected
+
2
R B(P)
VIN
R B(P)
R T(T)
_
R B(P)
6
_
7
R B(P)
VOUT
+
34
5
EHS07025
Data Sheet
1
2000-07-01