
Silicon Microstructures, Inc.
DESCRIPTION
The SM1493 is a digital, medium pressure MEMS sensor, with an optional analog output, offering state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce a digital or analog, fully conditioned, pressure and temperature compensated sensor in JEDEC standard SOIC-10 package with vertical port. It is a asymmetric differential pressure sensor.
FEATURES
• Pressure range of -90 to 50 kPa asymmetric differential output
• 16-bit digital, pressure calibrated and temperature compensated
output
• I2C Digital and Analog Interface
• Accuracy: ±3% full scale
• Compensated temperature range: 0 to +95°C
• Insensitive to mounting orientation
• Robust JEDEC SOIC-10 package for automated assembly
• Manufactured according to ISO9001 and ISO/TS 16949 standards