C8000-20 データシートの表示（PDF） - Hamamatsu Photonics
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C8000-20 Datasheet PDF : 2 Pages
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DATA SHEET
BT(Back-thinned)-CCD
Video Camera
C8000-20
The C8000 camera series employs an ultra high sensitive
back-thinned CCD sensor made by Hamamatsu. Espe-
cially in the UV, DUV and VUV wavelength ranges, the
C8000 series offers extremely high sensitivity never be-
fore realized by other scientific CCDs.
Spectral Response Characteristic of CCD chip*
(This is typical, not guaranteed. )
100
80
60
40
20
0
100 200 300 400 500 600 700 800 900 1000 1100 1200
Wavelength (nm)
* Without sapphire window. The spectral response with sapphire
window is decrease by the transmittance.
FEATURES
q Extremely high UV, DUV and VUV
sensitivity
q Quantum Efficiency of CCD chip
(This is typical, not guaranteed. )
Excimer Laser
F2
ArF KrF
Wavelength (nm)
157
193
248
Quantum
Without sapphire
window
Efficiency(%) With sapphire
window
84
34 **
57
69
42 ** 55 **
**Calclated value
APPLICATIONS
q Beam Diagnostics of Stepper
Excimer Lasers: F2(157 nm), ArF
(193 nm), KrF (248 nm)
q Development of UV optics
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