
Murata Manufacturing
The SCA103T Series is a 3D-MEMS-based single axis inclinometer family that uses the differential measurement principle. The high calibration accuracy combines extremely low temperature dependency, high resolution and low noise together with a robust sensing element design, to make the SCA103T an ideal choice for high accuracy leveling instruments. The VTI inclinometers are insensitive to vibration due to having over damped sensing elements plus they can withstand mechanical shocks of 20000 g.
FEATUREs
• Measuring ranges ±15° SCA103T-D04 and ± 30° SCA103T-D05
• 0.001° resolution (10 Hz BW, analog output)
• Sensing element controlled over damped frequency response (-3dB 18Hz)
• Robust design, high shock durability (20000g)
• Excellent stability over temperature and time
• Common mode error and noise reduction using the differential measurement principle
• Single +5 V supply
• Ratiometric analog voltage outputs
• Digital SPI inclination and temperature output
• Comprehensive failure detection features
o True self test by deflecting the sensing elements’ proof mass by electrostatic force.
o Continuous sensing element interconnection failure check.
o Continuous memory parity check.
• RoHS compliant
• Compatible with Pb-free reflow solder process
APPLICATIONs
• Platform leveling and stabilization
• Rotating laser levels
• Leveling instruments
• Construction levels