
Intersema Sensoric SA
DESCRIPTION
The sensor element of the MS761A consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor (MS761-A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (S-761-D) has a hole in the Pyrex glass at the backside of the sensor.
• 0 to 100 kPa bar range (1 bar or 14.5 PSI)
• High Sensitivity
• ROHS-Compatible & Pb-free1
FEATURES
• Uncompensated pressure sensor die
• High Sensitivity: Output Span 240 mV @ 5V
• Temperature Range -40°C …+ 125°C
• Linearity 0.15 % (typical)
• Small Die Size 2.00 X 1.86 mm
• Low cost, High reliability
APPLICATION
• For high resolution absolute sensor systems
• Engine Controls
• Barometers, Altimeters, Variometers