DESCRIPTION
MAS6510 capacitive sensor signal Interface IC can interface both single and dual capacitance sensors.
It uses a 24-bit Capacitance-to-Digital Converter (CDC), which employs a delta-sigma (ΔΣ) conversion technique. The output data from the high order ΔΣ-modulator is processed by an on-chip decimator filter, producing a high resolution conversion result. The converter is run by an internal clock oscillator making an external converter clock unnecessary.

FEATURES
• Sensor Offset and Gain Adjustment
   • Changing Capacitance Range ΔC 2pF…30pF
   • Internal Offset Capacitance Matrix 0pF…22pF
   • External Capacitance up to 160pF
• Resolution 17.5 bit
• Internal Clock Oscillator
• On Chip Temperature Sensor -40°C...+85°C
• VDD Level Monitoring
• Low Voltage Operation 1.8 V/1.9V…3.6 V
• Low Supply Current: 3.5 µA...50.3 µA
• Conversion Time 5.8ms...82.6ms (12Hz...173Hz)
• Internal 256-bit EEPROM Calibration Memory
• Internal Clock Oscillator
• I2C and SPI Compatible Serial Interface
• QFN-16 Package

APPLICATIONS
• Capacitive Pressure Sensors
• Humidity Sensors
• Medical Devices
• Flow Meters
• Sport Watches
• Altimeter and Barometer Systems
• Mobile and Battery Powered Systems
• Low Frequency Measurement applications
• Current/Power Consumption Critical Systems
• Industrial and Process Control applications in
   noisy environments