
Silicon Microstructures, Inc.
DESCRIPTION
The SM5420E is a small outline SO8 packaged pressure sensor that incorporates SMI’s new SM5108E MEMS piezoresistive pressure sensing die. The SM5420E has been optimized to provide the highest possible stability for a package of this size. Performance is achieved through careful resistor placement and mechanical configuration along with advanced MEMS processing.
The packaged sensor is intended for high volume applications where cost is a critical factor, such as consumer and automotive products. The SM5420E is available as an absolute pressure sensor in full-scale ranges of 30, 60 and 100PSI. It is designed to be surface-mounted on substrates by high-volume OEM manufacturers.
FEATURES
• Improved stability with integrated field shields
• Small SO8 surface-mount package
• 95 millivolt span
• Constant current or constant voltage drive
• Ported or non-ported configurations
• Wide operating temperature range (-40° to +125°C)
• Integrated die-level ESD protection
• Qualified using AEC-Q100 Grade 1 standards