
Intersema Sensoric SA
DESCRIPTION
The sensor element of the MS7912 consists of a small silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor (MS7912A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (MS7912D) has a hole in the Pyrex glass at the backside of the sensor.
• 0 to 1200 kPa range (12 bar or 174 PSI)
• Absolute/differential pressure sensors
• High linearity, small size
• RoHS-compatible & Pb-free1
FEATURES
• Uncompensated pressure sensor die
• Linearity 0.05% (typical)
• Output Span 150mV @ 5V
• Small Die Size 1.72 x 1.58mm
• Temperature Range -40°…+125°C
• Low Cost, High reliability
APPLICATION
• For absolute or differential pressure sensor systems
• Engine controls
• Dive computers