
Intersema Sensoric SA
DESCRIPTION
The MS7305D pressure sensor die is designed for low pressure sensor systems with the highest demands on resolution and accuracy. Its sensor element consists of a silicon micro-machined membrane bonded on a Pyrex™ glass support. The sensor signal is proportional to the pressure difference between back and front side of the membrane. The pressure is sensed by four implanted piezoresistors, giving a large output signal.
• 0 to 5 kPa (50 mbar or 0.73 PSI)
• Uncompensated differential pressure sensor die
• Piezoresistive silicon micromachined sensor
• High output signal 110mV
• Small size
• RoHS-compatible & Pb-free1
FEATURES
• Uncompensated differential pressure sensor die
• Die size 2.45 mm x 2.45 mm
• Output span 110 mV @ 5 V
• Low cost, high reliability, low drift
• Temperature range -40°C to +125 °C
• High pressure burst capability (600 kPa)
• Typical linearity 0.3% (5kPa) or 0.1% (1kPa)
APPLICATION
• Washing machines
• Industrial controls
• Level indicators
• Leak detection