SPECIFICATIONS
• 1, and 12 bar absolute pressure range
• Uncompensated
• Piezoresistive silicon micromachined sensor
• Surface mount 7.6 x 7.6 mm
• Low-noise, high-sensitivity, high-linearity

The MS52XX SMD pressure sensor series is designed for pressure systems with the highest demands on resolution and accuracy. The device consists of a silicon micromachined pressure sensor die mounted on a 7.6 x 7.6 mm ceramic carrier protected by a metal cap. The MS52XX can be delivered in a highly-sensitive version giving a maximal output voltage or in a highly-linear version giving a linear output voltage directly proportional to the applied pressure.